瀏覽次數:432by:熾燄光電

Mono Wafer 156 *156mm

Item
Specification
Unit
Remarks
Crystal Growth Method
CZ
--
 
Crystal Orientation
<100> ± 3
degree
 
Conductivity Type
P
--
 
Dopant
Boron
--
 
Resistivity
0.5 ~ 3
Ω - cm
 
EPD
< 2000
ea/cm2
 
Life Time
> 10
µS
@Ingot Level
Oxygen Contents
~ 1 x E18 at/cm3
 
ASTM F121-83
Carbon Contents
~ 1 x E18 at/cm3
 
 
Diameter
200 ± 0.5
mm
 
Square length
156 ± 0.5
mm
 
Chord length
125.2 ± 1.5
mm
 
Thickness
200 ± 20
µm
 
TTV
<= 40
µm
 
Warp
<= 100
µm
De-Stressed
Edge Chips
<= 3
mm
 
Front Surface
As wire-saw
--
 
Back Surface
As wire-saw
--
 
Appearance Free of cracks, craw feet and foreign materials;
Saw mark depth <20 um
Packing Shrink wrap ; per 100 wafers
Note Mono-crystalline; Angle between square sides : 90 deg. +/-18'

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